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Multiphysics simulation at the heart of MEMS

MEMS (Micro-Electro-Mechanical Systems) combine electrical, mechanical and fluidic phenomena at the microscopic scale. Their design requires a strongly coupled approach, capable of simultaneously representing the different physical phenomena involved.

SIMTEC supports the development and optimization of MEMS devices by leveraging its expertise in multiphysics simulation.

Essential physical couplings

MEMS are the field par excellence where it is necessary to carry out a true multiphysics simulation, with strong coupling between several physical phenomena.

Our studies notably cover:

  • Electromagnetism, taking into account Coulomb forces, using either an energy-based approach or the Maxwell stress tensor.
  • Structural mechanics, in order to analyze displacements, deformations, and the behavior of microstructures.
  • Microfluidics, incorporating interface wettability as well as surface tension phenomena.

A technology at the intersection of several physical phenomena

This approach makes it possible in particular to study and optimize:

  • MEMS sensors;
  • microactuators;
  • microfluidic components;
  • microsystems coupling several physical phenomena.

Mastering multiphysics couplings is now a key element in the design of next-generation microsystems.

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